{"id":4188,"date":"2025-07-17T16:13:41","date_gmt":"2025-07-17T08:13:41","guid":{"rendered":"https:\/\/www.superfinemill.com\/?p=4188"},"modified":"2025-07-17T16:21:11","modified_gmt":"2025-07-17T08:21:11","slug":"what-are-the-three-most-popular-polishing-powders","status":"publish","type":"post","link":"https:\/\/www.superfinemill.com\/vi\/what-are-the-three-most-popular-polishing-powders\/","title":{"rendered":"ba lo\u1ea1i b\u1ed9t \u0111\u00e1nh b\u00f3ng ph\u1ed5 bi\u1ebfn nh\u1ea5t l\u00e0 g\u00ec?"},"content":{"rendered":"<p>B\u1ed9t \u0111\u00e1nh b\u00f3ng l\u00e0 v\u1eadt li\u1ec7u quan tr\u1ecdng trong \u0111\u00e1nh b\u00f3ng b\u00e1n d\u1eabn, \u0111\u00f3ng vai tr\u00f2 then ch\u1ed1t trong vi\u1ec7c \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 ho\u00e0n thi\u1ec7n v\u00e0 \u0111\u1ed9 m\u1ecbn b\u1ec1 m\u1eb7t mong mu\u1ed1n. B\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng c\u00e1c h\u1ea1t m\u00e0i m\u00f2n chuy\u00ean d\u1ee5ng, b\u1ed9t \u0111\u00e1nh b\u00f3ng lo\u1ea1i b\u1ecf hi\u1ec7u qu\u1ea3 c\u00e1c l\u1edbp v\u1eadt li\u1ec7u si\u00eau nh\u1ecf kh\u1ecfi t\u1ea5m wafer b\u00e1n d\u1eabn, \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 ch\u00ednh x\u00e1c cao v\u00e0 gi\u1ea3m thi\u1ec3u khuy\u1ebft t\u1eadt. Qu\u00e1 tr\u00ecnh n\u00e0y r\u1ea5t quan tr\u1ecdng \u0111\u1ec3 n\u00e2ng cao hi\u1ec7u su\u1ea5t v\u00e0 \u0111\u1ed9 tin c\u1eady c\u1ee7a c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn, khi\u1ebfn b\u1ed9t \u0111\u00e1nh b\u00f3ng tr\u1edf th\u00e0nh m\u1ed9t ph\u1ea7n kh\u00f4ng th\u1ec3 thi\u1ebfu trong s\u1ea3n xu\u1ea5t \u0111i\u1ec7n t\u1eed hi\u1ec7n \u0111\u1ea1i. Hi\u1ec7n nay, c\u00e1c lo\u1ea1i b\u1ed9t \u0111\u00e1nh b\u00f3ng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng ph\u1ed5 bi\u1ebfn nh\u1ea5t l\u00e0 SiO2, CeO2 v\u00e0 Al2O3.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Xeri oxit, vua c\u1ee7a <a href=\"https:\/\/www.superfinemill.com\/vi\/products\/\">b\u1ed9t \u0111\u00e1nh b\u00f3ng<\/a><\/h2>\n\n\n\n<p>Xeri l\u00e0 nguy\u00ean t\u1ed1 th\u1ee9 hai trong nh\u00f3m Lantan v\u00e0 l\u00e0 nguy\u00ean t\u1ed1 ph\u1ed5 bi\u1ebfn th\u1ee9 25 tr\u00ean Tr\u00e1i \u0110\u1ea5t, g\u1ea7n b\u1eb1ng \u0111\u1ed3ng.<br>\u1ede tr\u1ea1ng th\u00e1i t\u1ef1 nhi\u00ean, oxit xeri (CeO2) l\u00e0 oxit xeri ph\u1ed5 bi\u1ebfn v\u00e0 \u1ed5n \u0111\u1ecbnh nh\u1ea5t. Oxit xeri th\u01b0\u1eddng c\u00f3 c\u1ea5u tr\u00fac tinh th\u1ec3 fluorit l\u1eadp ph\u01b0\u01a1ng v\u1edbi nh\u00f3m kh\u00f4ng gian Fm3m. C\u1ea5u tr\u00fac l\u1edbp electron h\u00f3a tr\u1ecb c\u1ee7a Ce l\u00e0 4f15d16s2, v\u00e0 ch\u00eanh l\u1ec7ch n\u0103ng l\u01b0\u1ee3ng gi\u1eefa c\u00e1c electron b\u00ean ngo\u00e0i v\u00e0 c\u00e1c electron b\u00ean trong r\u1ea5t nh\u1ecf. Do \u0111\u00f3, oxit xeri c\u00f3 hai tr\u1ea1ng th\u00e1i h\u00f3a tr\u1ecb: h\u00f3a tr\u1ecb ba v\u00e0 h\u00f3a tr\u1ecb b\u1ed1n. D\u01b0\u1edbi t\u00e1c \u0111\u1ed9ng c\u1ee7a m\u00f4i tr\u01b0\u1eddng b\u00ean ngo\u00e0i, Ce3+ v\u00e0 Ce4+ c\u00f3 th\u1ec3 chuy\u1ec3n \u0111\u1ed5i l\u1eabn nhau, k\u00e8m theo s\u1ef1 h\u00ecnh th\u00e0nh v\u00e0 bi\u1ebfn m\u1ea5t c\u1ee7a c\u00e1c l\u1ed7 tr\u1ed1ng oxy. D\u1ef1a tr\u00ean t\u00ednh ch\u1ea5t n\u00e0y, oxit xeri c\u00f3 kh\u1ea3 n\u0103ng ph\u1ea3n \u1ee9ng m\u1ea1nh. V\u1eadt li\u1ec7u m\u00e0i m\u00f2n oxit xeri c\u00f3 th\u1ec3 t\u1ea1o ra c\u00e1c r\u0103ng h\u00f3a h\u1ecdc d\u1ec5 d\u00e0ng th\u00e1o r\u1eddi tr\u00ean b\u1ec1 m\u1eb7t ph\u00f4i \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c hi\u1ec7u su\u1ea5t \u0111\u00e1nh b\u00f3ng tuy\u1ec7t v\u1eddi.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><a href=\"https:\/\/www.superfinemill.com\/vi\/dry-grinding\/ball-mill-and-air-classifier-production-system\/\">Xeri oxit<\/a>, vua c\u1ee7a b\u1ed9t \u0111\u00e1nh b\u00f3ng<\/h2>\n\n\n\n<figure class=\"wp-block-image size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"800\" height=\"532\" src=\"https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/Cerium-Oxide.webp\" alt=\"\" class=\"wp-image-4189\" srcset=\"https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/Cerium-Oxide.webp 800w, https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/Cerium-Oxide-300x200.webp 300w, https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/Cerium-Oxide-768x511.webp 768w, https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/Cerium-Oxide-18x12.webp 18w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/><\/figure>\n\n\n\n<p>Xeri, nguy\u00ean t\u1ed1 th\u1ee9 hai trong h\u1ecd lanthanide v\u00e0 l\u00e0 nguy\u00ean t\u1ed1 ph\u1ed5 bi\u1ebfn th\u1ee9 25 tr\u00ean Tr\u00e1i \u0110\u1ea5t, c\u00f3 h\u00e0m l\u01b0\u1ee3ng t\u01b0\u01a1ng \u0111\u01b0\u01a1ng v\u1edbi \u0111\u1ed3ng. Trong t\u1ef1 nhi\u00ean, xeri th\u01b0\u1eddng t\u1ed3n t\u1ea1i d\u01b0\u1edbi d\u1ea1ng xeri oxit (CeO2), l\u00e0 oxit b\u1ec1n nh\u1ea5t v\u00e0 ph\u1ed5 bi\u1ebfn nh\u1ea5t c\u1ee7a xeri. Xeri oxit c\u00f3 c\u1ea5u tr\u00fac tinh th\u1ec3 fluorit l\u1eadp ph\u01b0\u01a1ng v\u1edbi nh\u00f3m kh\u00f4ng gian Fm3m. C\u1ea5u h\u00ecnh electron c\u1ee7a xeri l\u00e0 4f15d16s2, v\u1edbi ch\u00eanh l\u1ec7ch n\u0103ng l\u01b0\u1ee3ng nh\u1ecf gi\u1eefa c\u00e1c electron ngo\u00e0i v\u00e0 trong. Do \u0111\u00f3, xeri oxit t\u1ed3n t\u1ea1i \u1edf hai tr\u1ea1ng th\u00e1i h\u00f3a tr\u1ecb: Ce3+ v\u00e0 Ce4+. D\u01b0\u1edbi t\u00e1c \u0111\u1ed9ng b\u00ean ngo\u00e0i, Ce3+ v\u00e0 Ce4+ c\u00f3 th\u1ec3 chuy\u1ec3n \u0111\u1ed5i l\u1eabn nhau, k\u00e8m theo s\u1ef1 h\u00ecnh th\u00e0nh v\u00e0 bi\u1ebfn m\u1ea5t c\u00e1c ch\u1ed7 khuy\u1ebft oxy. Do \u0111\u1eb7c t\u00ednh n\u00e0y, xeri oxit th\u1ec3 hi\u1ec7n kh\u1ea3 n\u0103ng ph\u1ea3n \u1ee9ng m\u1ea1nh.<\/p>\n\n\n\n<p>V\u1eadt li\u1ec7u m\u00e0i m\u00f2n oxit xeri c\u00f3 th\u1ec3 t\u1ea1o th\u00e0nh c\u00e1c r\u0103ng h\u00f3a h\u1ecdc d\u1ec5 th\u00e1o r\u1eddi tr\u00ean b\u1ec1 m\u1eb7t ph\u00f4i, \u0111\u1ea3m b\u1ea3o hi\u1ec7u su\u1ea5t \u0111\u00e1nh b\u00f3ng tuy\u1ec7t v\u1eddi.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u01afu \u0111i\u1ec3m c\u1ee7a <a href=\"https:\/\/www.superfinemill.com\/vi\/dry-grinding\/fluidized-bed-opposed-air-jet-mill\/\">Xeri oxit<\/a> nh\u01b0 m\u1ed9t ch\u1ea5t m\u00e0i m\u00f2n<\/h3>\n\n\n\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" width=\"800\" height=\"553\" src=\"https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/silicon-dioxide.webp\" alt=\"\" class=\"wp-image-4190\" srcset=\"https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/silicon-dioxide.webp 800w, https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/silicon-dioxide-300x207.webp 300w, https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/silicon-dioxide-768x531.webp 768w, https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/silicon-dioxide-18x12.webp 18w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/><\/figure>\n\n\n\n<p><strong>S\u1ee9c m\u1ea1nh oxy h\u00f3a m\u1ea1nh:<\/strong> Xeri h\u00f3a tr\u1ecb b\u1ed1n trong oxit xeri c\u00f3 t\u00e1c d\u1ee5ng oxy h\u00f3a m\u1ea1nh, g\u00f3p ph\u1ea7n t\u1ea1o ra t\u01b0\u01a1ng t\u00e1c h\u00f3a h\u1ecdc m\u1ea1nh m\u1ebd v\u1edbi v\u1eadt li\u1ec7u \u0111\u00e1nh b\u00f3ng.<\/p>\n\n\n\n<p><strong>\u0110\u1ed9 c\u1ee9ng ph\u00f9 h\u1ee3p:<\/strong> Oxit xeri m\u1ec1m h\u01a1n m\u1ed9t ch\u00fat so v\u1edbi wafer silicon. N\u00f3 ng\u0103n ng\u1eeba h\u01b0 h\u1ecfng c\u01a1 h\u1ecdc \u0111\u00e1ng k\u1ec3 \u0111\u1ed3ng th\u1eddi t\u1ea1o ra b\u1ec1 m\u1eb7t nh\u1eb5n m\u1ecbn, s\u1ea1ch s\u1ebd.<\/p>\n\n\n\n<p><strong>T\u1ed1c \u0111\u1ed9 v\u00e0 hi\u1ec7u qu\u1ea3 \u0111\u00e1nh b\u00f3ng cao:<\/strong> T\u1ed1c \u0111\u1ed9 \u0111\u00e1nh b\u00f3ng nhanh h\u01a1n t\u1eeb 3 \u0111\u1ebfn 4 l\u1ea7n so v\u1edbi c\u00e1c ch\u1ea5t m\u00e0i m\u00f2n kh\u00e1c.<\/p>\n\n\n\n<p><strong>H\u00ecnh d\u1ea1ng v\u00e0 ho\u1ea1t \u0111\u1ed9ng tinh th\u1ec3 v\u01b0\u1ee3t tr\u1ed9i:<\/strong> Xeri oxit c\u00f3 c\u1ea5u tr\u00fac tinh th\u1ec3 v\u00e0 \u0111\u1ed9 \u0111\u1ed3ng nh\u1ea5t tuy\u1ec7t v\u1eddi. N\u00f3 c\u1ea7n \u00edt v\u1eadt li\u1ec7u h\u01a1n v\u00e0 b\u1ec1n h\u01a1n.<\/p>\n\n\n\n<p><strong>S\u1ea1ch s\u1ebd v\u00e0 th\u00e2n thi\u1ec7n v\u1edbi m\u00f4i tr\u01b0\u1eddng:<\/strong> B\u00f9n \u0111\u00e1nh b\u00f3ng oxit xeri s\u1ea1ch, kh\u00f4ng g\u00e2y \u00f4 nhi\u1ec5m v\u00e0 d\u1ec5 x\u1eed l\u00fd.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Silicon dioxide, \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng ph\u1ed5 bi\u1ebfn nh\u1ea5t<\/h2>\n\n\n\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" width=\"800\" height=\"476\" src=\"https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/Alumina.webp\" alt=\"\" class=\"wp-image-4191\" srcset=\"https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/Alumina.webp 800w, https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/Alumina-300x179.webp 300w, https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/Alumina-768x457.webp 768w, https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/Alumina-18x12.webp 18w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/><\/figure>\n\n\n\n<p>Nano-SiO2 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong l\u0129nh v\u1ef1c \u0111\u00e1nh b\u00f3ng c\u01a1 h\u1ecdc h\u00f3a h\u1ecdc nh\u1edd \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh, kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t v\u00e0 \u0111\u1ed9 l\u01a1 l\u1eedng tuy\u1ec7t v\u1eddi. D\u1ef1a tr\u00ean h\u00ecnh th\u00e1i, n\u00f3 c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c chia th\u00e0nh d\u1ea1ng h\u00ecnh c\u1ea7u v\u00e0 d\u1ea1ng kh\u00f4ng c\u1ea7u.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">B\u1ed9t \u0111\u00e1nh b\u00f3ng Nano SiO2 h\u00ecnh c\u1ea7u<\/h3>\n\n\n\n<p>B\u1ed9t \u0111\u00e1nh b\u00f3ng nano SiO2 h\u00ecnh c\u1ea7u l\u00e0 v\u1eadt li\u1ec7u \u0111\u00e1nh b\u00f3ng ch\u00ednh cho wafer b\u00e1n d\u1eabn. Sau khi \u0111\u01b0\u1ee3c x\u1eed l\u00fd b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p CMP (Chemical Mechanical Planarization), \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t wafer \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng b\u1eb1ng h\u1ea1t m\u00e0i nano SiO2 h\u00ecnh c\u1ea7u t\u1ed1t h\u01a1n \u0111\u00e1ng k\u1ec3 so v\u1edbi h\u1ea1t m\u00e0i nano SiO2 kh\u00f4ng h\u00ecnh c\u1ea7u. Tuy nhi\u00ean, t\u1ef7 l\u1ec7 CMP c\u1ee7a h\u1ea1t m\u00e0i nano SiO2 h\u00ecnh c\u1ea7u truy\u1ec1n th\u1ed1ng kh\u00f4ng c\u00f2n \u0111\u00e1p \u1ee9ng \u0111\u01b0\u1ee3c nhu c\u1ea7u x\u1eed l\u00fd hi\u1ec7n t\u1ea1i. Do \u0111\u00f3, vi\u1ec7c c\u1ea3i thi\u1ec7n hi\u1ec7u su\u1ea5t c\u1ee7a h\u1ea1t m\u00e0i h\u00ecnh c\u1ea7u l\u00e0 m\u1ed9t nhu c\u1ea7u c\u1ea5p thi\u1ebft. Xu h\u01b0\u1edbng ch\u1ee7 \u0111\u1ea1o hi\u1ec7n nay trong v\u00e0 ngo\u00e0i n\u01b0\u1edbc l\u00e0 bi\u1ebfn t\u00ednh h\u1ea1t m\u00e0i b\u1eb1ng c\u00e1ch b\u1ed5 sung mesopore ho\u1eb7c pha t\u1ea1p. Nh\u1eb1m t\u0103ng t\u1ef7 l\u1ec7 \u0111\u00e1nh b\u00f3ng v\u00e0 \u0111\u1ea1t hi\u1ec7u su\u1ea5t x\u1eed l\u00fd cao h\u01a1n cho wafer, vi\u1ec7c \u0111\u00e1nh b\u00f3ng wafer \u0111ang \u0111\u01b0\u1ee3c ti\u1ebfn h\u00e0nh.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">V\u1eadt li\u1ec7u m\u00e0i m\u00f2n Nano SiO2 kh\u00f4ng h\u00ecnh c\u1ea7u<\/h3>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"800\" height=\"600\" src=\"https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/EPIC-ball-mill.webp\" alt=\"EPIC ball-mill\" class=\"wp-image-4192\" srcset=\"https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/EPIC-ball-mill.webp 800w, https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/EPIC-ball-mill-300x225.webp 300w, https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/EPIC-ball-mill-768x576.webp 768w, https:\/\/www.superfinemill.com\/wp-content\/uploads\/2025\/07\/EPIC-ball-mill-16x12.webp 16w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/><\/figure>\n\n\n\n<p>B\u1ed9t \u0111\u00e1nh b\u00f3ng nano SiO2 kh\u00f4ng h\u00ecnh c\u1ea7u c\u00f3 h\u00ecnh d\u1ea1ng b\u1ea5t th\u01b0\u1eddng, d\u1eabn \u0111\u1ebfn di\u1ec7n t\u00edch b\u1ec1 m\u1eb7t ri\u00eang l\u1edbn h\u01a1n. \u0110i\u1ec1u n\u00e0y d\u1eabn \u0111\u1ebfn t\u1ed1c \u0111\u1ed9 \u0111\u00e1nh b\u00f3ng cao h\u01a1n so v\u1edbi v\u1eadt li\u1ec7u m\u00e0i h\u00ecnh c\u1ea7u. Hi\u1ec7n nay, c\u00e1c v\u1eadt li\u1ec7u m\u00e0i h\u00ecnh d\u1ea1ng b\u1ea5t th\u01b0\u1eddng nh\u01b0 h\u00ecnh c\u00e1nh hoa, h\u00ecnh qu\u1ea3 t\u1ea1, h\u00ecnh b\u1ea7u d\u1ee5c, h\u00ecnh que, h\u00ecnh k\u00e9n v\u00e0 h\u00ecnh c\u1ed9t \u0111\u00e3 \u0111\u01b0\u1ee3c t\u1ed5ng h\u1ee3p th\u00e0nh c\u00f4ng. Tuy nhi\u00ean, v\u1eadt li\u1ec7u m\u00e0i kh\u00f4ng h\u00ecnh c\u1ea7u th\u01b0\u1eddng c\u00f3 c\u00e1c c\u1ea1nh v\u00e0 g\u00f3c s\u1eafc, d\u1ec5 g\u00e2y tr\u1ea7y x\u01b0\u1edbc b\u1ec1 m\u1eb7t wafer trong qu\u00e1 tr\u00ecnh CMP. \u0110i\u1ec1u n\u00e0y d\u1eabn \u0111\u1ebfn \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t t\u0103ng l\u00ean v\u00e0 \u0111\u1ed9 ph\u1eb3ng c\u1ee7a b\u1ec1 m\u1eb7t wafer gi\u1ea3m \u0111i.<\/p>\n\n\n\n<p>Nh\u00ecn chung, SiO2 c\u00f3 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh v\u00e0 kh\u1ea3 n\u0103ng ph\u00e2n t\u00e1n tuy\u1ec7t v\u1eddi, kh\u00f4ng g\u00e2y nhi\u1ec5m b\u1ea9n cation kim lo\u1ea1i. \u0110\u1ed9 c\u1ee9ng c\u1ee7a n\u00f3 g\u1ea7n b\u1eb1ng silic nguy\u00ean t\u1ed1, v\u00e0 \u00edt g\u00e2y tr\u1ea7y x\u01b0\u1edbc ho\u1eb7c m\u00e0i m\u00f2n cho v\u1eadt li\u1ec7u n\u1ec1n. Nh\u1eefng \u0111\u1eb7c t\u00ednh n\u00e0y l\u00e0m cho v\u1eadt li\u1ec7u m\u00e0i SiO2 ph\u00f9 h\u1ee3p \u0111\u1ec3 \u0111\u00e1nh b\u00f3ng kim lo\u1ea1i m\u1ec1m, silic v\u00e0 c\u00e1c v\u1eadt li\u1ec7u kh\u00e1c. Do \u0111\u00f3, SiO2 hi\u1ec7n l\u00e0 v\u1eadt li\u1ec7u m\u00e0i \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i nh\u1ea5t trong c\u00e1c lo\u1ea1i b\u00f9n \u0111\u00e1nh b\u00f3ng.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Nh\u00f4m oxit, hi\u1ec7u su\u1ea5t cao<\/h2>\n\n\n\n<p>Nh\u00f4m oxit (Al\u2082O\u2083) t\u1ed3n t\u1ea1i \u1edf nhi\u1ec1u d\u1ea1ng tinh th\u1ec3, v\u1edbi h\u01a1n 10 lo\u1ea1i \u0111\u00e3 bi\u1ebft. C\u00e1c d\u1ea1ng ph\u1ed5 bi\u1ebfn nh\u1ea5t l\u00e0 pha \u03b1, \u03b2 v\u00e0 \u03b3. Trong s\u1ed1 \u0111\u00f3, \u03b1-Al\u2082O\u2083 l\u00e0 tinh th\u1ec3 m\u00e0u tr\u1eafng, th\u01b0\u1eddng c\u00f3 d\u1ea1ng h\u00ecnh thoi, v\u1edbi c\u1ea5u tr\u00fac corundum. \u0110\u00e2y l\u00e0 d\u1ea1ng tinh th\u1ec3 \u1ed5n \u0111\u1ecbnh nh\u1ea5t v\u1edbi di\u1ec7n t\u00edch b\u1ec1 m\u1eb7t ri\u00eang th\u1ea5p, c\u1ea5u tr\u00fac \u0111\u1eb7c v\u00e0 \u0111\u1ed9 ph\u1ea3n \u1ee9ng th\u1ea5p, khi\u1ebfn n\u00f3 r\u1ea5t \u1ed5n \u0111\u1ecbnh \u1edf nhi\u1ec7t \u0111\u1ed9 cao. Pha n\u00e0y c\u0169ng mang l\u1ea1i c\u00e1c t\u00ednh ch\u1ea5t c\u01a1 h\u1ecdc v\u00e0 \u0111i\u1ec7n tuy\u1ec7t v\u1eddi. Trong \u0111\u00e1nh b\u00f3ng c\u01a1 h\u1ecdc h\u00f3a h\u1ecdc (CMP), b\u1ed9t \u0111\u00e1nh b\u00f3ng nh\u00f4m oxit th\u01b0\u1eddng \u0111\u01b0\u1ee3c l\u1ef1a ch\u1ecdn v\u00ec \u0111\u1ed9 c\u1ee9ng, \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng n\u01b0\u1edbc v\u00e0 axit cao, trong \u0111\u00f3 \u03b1-Al\u2082O\u2083 l\u00e0 lo\u1ea1i \u0111\u01b0\u1ee3c \u01b0a chu\u1ed9ng.<\/p>\n\n\n\n<p>H\u00ecnh d\u1ea1ng v\u00e0 k\u00edch th\u01b0\u1edbc c\u1ee7a c\u00e1c h\u1ea1t alumina \u1ea3nh h\u01b0\u1edfng tr\u1ef1c ti\u1ebfp \u0111\u1ebfn hi\u1ec7u su\u1ea5t \u0111\u00e1nh b\u00f3ng trong CMP. Khi b\u1ed9t alumina h\u00ecnh c\u1ea7u si\u00eau nh\u1ecf c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng l\u00e0m ch\u1ea5t m\u00e0i m\u00f2n trong b\u00f9n CMP, n\u00f3 mang l\u1ea1i t\u1ed1c \u0111\u1ed9 lo\u1ea1i b\u1ecf cao, \u0111\u00e1nh b\u00f3ng nhanh v\u00e0 h\u1ea1n ch\u1ebf t\u1ed1i \u0111a s\u1ef1 h\u00ecnh th\u00e0nh c\u00e1c v\u1ebft x\u01b0\u1edbc si\u00eau nh\u1ecf tr\u00ean b\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng, mang l\u1ea1i \u0111\u1ed9 m\u1ecbn tuy\u1ec7t v\u1eddi. Nh\u1eefng \u0111\u1eb7c t\u00ednh n\u00e0y l\u00e0m cho n\u00f3 tr\u1edf n\u00ean l\u00fd t\u01b0\u1edfng cho vi\u1ec7c \u0111\u00e1nh b\u00f3ng ch\u00ednh x\u00e1c c\u00e1c thi\u1ebft b\u1ecb quang h\u1ecdc, tinh th\u1ec3 th\u1ea1ch anh v\u00e0 tinh th\u1ec3 \u0111\u01a1n b\u00e1n d\u1eabn. Do \u0111\u00f3, vi\u1ec7c ch\u1ebf t\u1ea1o alumina h\u00ecnh c\u1ea7u si\u00eau nh\u1ecf \u0111\u00e3 tr\u1edf th\u00e0nh m\u1ed9t ch\u1ee7 \u0111\u1ec1 nghi\u00ean c\u1ee9u n\u00f3ng h\u1ed5i.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Ph\u1ea7n k\u1ebft lu\u1eadn<\/h2>\n\n\n\n<p>Nh\u00f4m oxit, xeri oxit v\u00e0 silic dioxit \u0111\u1ec1u c\u00f3 \u01b0u v\u00e0 nh\u01b0\u1ee3c \u0111i\u1ec3m ri\u00eang. Ch\u00fang l\u00e0 ba lo\u1ea1i v\u1eadt li\u1ec7u m\u00e0i m\u00f2n \u0111\u00e1nh b\u00f3ng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng ph\u1ed5 bi\u1ebfn nh\u1ea5t. Ngo\u00e0i ra, v\u1edbi s\u1ef1 ra \u0111\u1eddi c\u1ee7a c\u00e1c ch\u1ea5t b\u00e1n d\u1eabn th\u1ebf h\u1ec7 th\u1ee9 ba, ch\u1eb3ng h\u1ea1n nh\u01b0 silic cacbua, c\u00e1c v\u1eadt li\u1ec7u m\u00e0i m\u00f2n si\u00eau c\u1ee9ng nh\u01b0 kim c\u01b0\u01a1ng \u0111\u00e3 nh\u1eadn \u0111\u01b0\u1ee3c s\u1ef1 quan t\u00e2m r\u1ed9ng r\u00e3i. Ch\u00fang \u0111ang nhanh ch\u00f3ng tr\u1edf th\u00e0nh m\u1ed9t trong nh\u1eefng v\u1eadt li\u1ec7u m\u00e0i m\u00f2n ph\u1ed5 bi\u1ebfn nh\u1ea5t trong ng\u00e0nh.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><a href=\"https:\/\/www.superfinemill.com\/vi\/contact\/\">b\u1ed9t s\u1eed thi<\/a><\/h2>\n\n\n\n<figure class=\"wp-block-embed is-type-video is-provider-youtube wp-block-embed-youtube wp-embed-aspect-16-9 wp-has-aspect-ratio\"><div class=\"wp-block-embed__wrapper\">\n<div class=\"ast-oembed-container\" style=\"height: 100%;\"><iframe title=\"Giao h\u00e0ng to\u00e0n c\u1ea7u m\u00e1y nghi\u1ec1n bi l\u00f3t g\u1ed1m c\u1ee7a Thanh \u0110\u1ea3o EPIC \u0111\u1ebfn \u1ea4n \u0110\u1ed9\" width=\"500\" height=\"281\" src=\"https:\/\/www.youtube.com\/embed\/MH7z1lGihvQ?feature=oembed\" frameborder=\"0\" allow=\"accelerometer; autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture; web-share\" referrerpolicy=\"strict-origin-when-cross-origin\" allowfullscreen><\/iframe><\/div>\n<\/div><\/figure>\n\n\n\n<p>EPIC Powder cung c\u1ea5p c\u00e1c gi\u1ea3i ph\u00e1p x\u1eed l\u00fd b\u1ed9t ti\u00ean ti\u1ebfn \u0111\u00e1p \u1ee9ng nhu c\u1ea7u \u0111\u1eb7c bi\u1ec7t c\u1ee7a c\u00e1c v\u1eadt li\u1ec7u m\u00e0i m\u00f2n \u0111\u00e1nh b\u00f3ng nh\u01b0 nh\u00f4m oxit, xeri oxit v\u00e0 silicon dioxide. Thi\u1ebft b\u1ecb m\u00e0i hi\u1ec7n \u0111\u1ea1i c\u1ee7a ch\u00fang t\u00f4i, ch\u1eb3ng h\u1ea1n nh\u01b0 <a href=\"https:\/\/www.superfinemill.com\/vi\/dry-grinding\/ball-mill-and-air-classifier-production-system\/\">m\u00e1y nghi\u1ec1n bi<\/a>, <a href=\"https:\/\/www.superfinemill.com\/vi\/dry-grinding\/fluidized-bed-opposed-air-jet-mill\/\">m\u00e1y nghi\u1ec1n ph\u1ea3n l\u1ef1c<\/a>v\u00e0 m\u00e1y ph\u00e2n lo\u1ea1i b\u1eb1ng kh\u00ed, \u0111\u1ea3m b\u1ea3o c\u00e1c v\u1eadt li\u1ec7u m\u00e0i m\u00f2n n\u00e0y \u0111\u1ea1t \u0111\u01b0\u1ee3c k\u00edch th\u01b0\u1edbc h\u1ea1t, \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 hi\u1ec7u su\u1ea5t t\u1ed1i \u01b0u. D\u00f9 l\u00e0 v\u1eadt li\u1ec7u \u0111\u00e1nh b\u00f3ng truy\u1ec1n th\u1ed1ng hay v\u1eadt li\u1ec7u m\u00e0i m\u00f2n si\u00eau c\u1ee9ng m\u1edbi n\u1ed5i nh\u01b0 kim c\u01b0\u01a1ng, thi\u1ebft b\u1ecb c\u1ee7a EPIC Powder \u0111\u1ec1u n\u00e2ng cao hi\u1ec7u qu\u1ea3 v\u00e0 ch\u1ea5t l\u01b0\u1ee3ng c\u1ee7a quy tr\u00ecnh \u0111\u00e1nh b\u00f3ng, \u0111\u00e1p \u1ee9ng nhu c\u1ea7u ng\u00e0y c\u00e0ng t\u0103ng c\u1ee7a c\u00e1c ng\u00e0nh c\u00f4ng nghi\u1ec7p nh\u01b0 s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn. V\u1edbi chuy\u00ean m\u00f4n v\u00e0 m\u00e1y m\u00f3c ti\u00ean ti\u1ebfn, ch\u00fang t\u00f4i cam k\u1ebft cung c\u1ea5p c\u00e1c gi\u1ea3i ph\u00e1p x\u1eed l\u00fd b\u1ed9t v\u01b0\u1ee3t tr\u1ed9i, \u0111\u00e1p \u1ee9ng c\u00e1c ti\u00eau chu\u1ea9n cao nh\u1ea5t v\u1ec1 \u0111\u1ed9 ch\u00ednh x\u00e1c v\u00e0 \u0111\u1ed9 tin c\u1eady.<\/p>\n\n\n\n<div class=\"wp-block-contact-form-7-contact-form-selector\">\n<div class=\"wpcf7 no-js\" id=\"wpcf7-f8-o1\" lang=\"zh-CN\" dir=\"ltr\" data-wpcf7-id=\"8\">\n<div class=\"screen-reader-response\"><p role=\"status\" aria-live=\"polite\" aria-atomic=\"true\"><\/p> <ul><\/ul><\/div>\n<form action=\"\/vi\/wp-json\/wp\/v2\/posts\/4188#wpcf7-f8-o1\" method=\"post\" class=\"wpcf7-form init\" aria-label=\"\u7559\u8a00\u8868\u5355\" novalidate=\"novalidate\" data-status=\"init\" data-trp-original-action=\"\/vi\/wp-json\/wp\/v2\/posts\/4188#wpcf7-f8-o1\">\n<fieldset class=\"hidden-fields-container\"><input type=\"hidden\" name=\"_wpcf7\" value=\"8\" \/><input type=\"hidden\" name=\"_wpcf7_version\" value=\"6.1\" \/><input type=\"hidden\" name=\"_wpcf7_locale\" value=\"zh_CN\" \/><input type=\"hidden\" name=\"_wpcf7_unit_tag\" value=\"wpcf7-f8-o1\" \/><input type=\"hidden\" name=\"_wpcf7_container_post\" value=\"0\" \/><input type=\"hidden\" name=\"_wpcf7_posted_data_hash\" value=\"\" \/>\n<\/fieldset>\n<div class=\"keen-form\">\n\t<div class=\"one-half\">\n\t\t<p><span class=\"wpcf7-form-control-wrap\" data-name=\"your-name\"><input size=\"40\" maxlength=\"400\" class=\"wpcf7-form-control wpcf7-text wpcf7-validates-as-required\" aria-required=\"true\" aria-invalid=\"false\" placeholder=\"T\u00ean c\u1ee7a b\u1ea1n*\" value=\"\" type=\"text\" name=\"your-name\" \/><\/span>\n\t\t<\/p>\n\t<\/div>\n\t<div class=\"one-half last\">\n\t\t<p><span class=\"wpcf7-form-control-wrap\" data-name=\"your-email\"><input size=\"40\" maxlength=\"400\" class=\"wpcf7-form-control wpcf7-email wpcf7-validates-as-required wpcf7-text 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class=\"wpcf7-form-control-wrap\" data-name=\"your-message\"><textarea cols=\"40\" rows=\"3\" maxlength=\"2000\" class=\"wpcf7-form-control wpcf7-textarea\" aria-invalid=\"false\" placeholder=\"Tin nh\u1eafn c\u1ee7a b\u1ea1n\" name=\"your-message\"><\/textarea><\/span>\n\t\t<\/p>\n\t<\/div>\n\t<div>\n\t\t<p><span class=\"wpcf7-form-control-wrap kc_captcha\" data-name=\"kc_captcha\"><span class=\"wpcf7-form-control wpcf7-radio\"><span class=\"captcha-image\" ><span class=\"cf7ic_instructions\">H\u00e3y ch\u1ee9ng minh b\u1ea1n l\u00e0 ng\u01b0\u1eddi b\u1eb1ng c\u00e1ch ch\u1ecdn<span> star<\/span>\u3002<\/span><label><input aria-label=\"1\" type=\"radio\" name=\"kc_captcha\" value=\"kc_human\" \/><svg aria-hidden=\"true\" role=\"img\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\" viewbox=\"0 0 576 512\"><path fill=\"currentColor\" d=\"M259 18l-65 132-146 22c-26 3-37 36-18 54l106 103-25 146c-5 26 23 46 46 33l131-68 131 68c23 13 51-7 46-33l-25-146 106-103c19-18 8-51-18-54l-146-22-65-132a32 32 0 00-58 0z\"\/><\/svg><\/label><label><input aria-label=\"2\" type=\"radio\" name=\"kc_captcha\" value=\"bot\" \/><svg aria-hidden=\"true\" role=\"img\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\" viewbox=\"0 0 640 512\"><path fill=\"currentColor\" d=\"M192 384h192c53 0 96-43 96-96h32a128 128 0 000-256H120c-13 0-24 11-24 24v232c0 53 43 96 96 96zM512 96a64 64 0 010 128h-32V96h32zm48 384H48c-47 0-61-64-36-64h584c25 0 11 64-36 64z\"\/><\/svg><\/label><label><input aria-label=\"3\" type=\"radio\" name=\"kc_captcha\" value=\"bot\" \/><svg aria-hidden=\"true\" role=\"img\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\" viewbox=\"0 0 384 512\"><path fill=\"currentColor\" d=\"M377 375l-83-87h34c21 0 32-25 17-40l-82-88h33c21 0 32-25 18-40L210 8c-10-11-26-11-36 0L70 120c-14 15-3 40 18 40h33l-82 88c-15 15-4 40 17 40h34L7 375c-15 16-4 41 17 41h120c0 33-11 49-34 68-12 9-5 28 10 28h144c15 0 22-19 10-28-20-16-34-32-34-68h120c21 0 32-25 17-41z\"\/><\/svg><\/label>\r\n    <\/span>\r\n    <span style=\"display:none\">\r\n        <input type=\"text\" name=\"kc_honeypot\">\r\n    <\/span><\/span><\/span>\n\t\t<\/p>\n\t<\/div>\n\t<div class=\"batton\">\n\t\t<p><input class=\"wpcf7-form-control wpcf7-submit has-spinner\" type=\"submit\" value=\"N\u1ed9p\" \/>\n\t\t<\/p>\n\t<\/div>\n<\/div>\n<style>\n.keen-form div{margin-bottom:0px;}\n.keen-form div p{margin-bottom:0px !important;}\n.one-half,.one-third {\n position: relative;\n margin-right: 4%;\n float: left;\n z-index: 99;\n}\n.one-half { width: 48%; }\n.one-third { width: 30.66%; }\n.last {\n margin-right: 0 !important;\n clear: right;\n}\n.batton { margin-top:2%\n}\n@media only screen and (max-width: 767px) {\n .one-half, .one-third {\n width: 100%;\n margin-right: 0;\n }\n}\n<\/style><div class=\"wpcf7-response-output\" aria-hidden=\"true\"><\/div>\n<input type=\"hidden\" name=\"trp-form-language\" value=\"vi\"\/><\/form>\n<\/div>\n<\/div>\n\n\n\n<p><\/p>","protected":false},"excerpt":{"rendered":"<p>B\u1ed9t \u0111\u00e1nh b\u00f3ng l\u00e0 v\u1eadt li\u1ec7u quan tr\u1ecdng trong \u0111\u00e1nh b\u00f3ng b\u00e1n d\u1eabn, \u0111\u00f3ng vai tr\u00f2 then ch\u1ed1t trong vi\u1ec7c \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 ho\u00e0n thi\u1ec7n v\u00e0 \u0111\u1ed9 m\u1ecbn b\u1ec1 m\u1eb7t mong mu\u1ed1n. B\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng v\u1eadt li\u1ec7u m\u00e0i m\u00f2n chuy\u00ean d\u1ee5ng 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